Mechanical Engineer Substrate Handling (all genders)

1 Mechanical Engineer Substrate Handling (all genders) Job-ID: 200758 I Work Location Model: On-site Flex I Arbeitsort: Salzburg I Work Country: Österreich

What you'll do

Substrate holder (Chuck) design

* Design and develop substrate holders (chucks) for wet chemistry processes, including plating, cleaning, and etching applications
* Define sealing concepts, panel support strategies, clamping mechanisms, and chemical exposure interfaces
* Optimize designs for uniform process conditions, minimal particle generation, and high substrate integrity (e.g. low breakage, controlled deformation)

Panel and substrate handling

* Design mechanical interfaces between substrate holders and tool automation (transfer systems, process chambers)
* Develop concepts for loading/unloading, alignment, gripping, and secure transport of panels
* Ensure safe interaction between handling systems and substrate holders to avoid damage and contamination
* Collaborate with multiple teams, e.g. automation teams on end effector and handling strategy development, and process teams on optimising process performance

Engineering development & validation

* Own full product lifecycle from concept through productization for chuck assemblies
* Perform detailed mechanical design including tolerance stack-ups, sealing interfaces, and alignment concepts
* Conduct analysis including structural, FEA, thermal effects, deformation, and vibration
* Develop and execute validation plans focusing on:
*
** Chemical compatibility (materials, coatings, seals)
** Lifetime and wear (seals, surfaces, interfaces)
** Process robustness (repeatability, alignment, uniformity)
* Drive root cause analysis and design improvements for field issues (e.g., leakage, breakage, handling failures, process failures)
* Build and support testing of prototypes in lab and tool environments
* Execute test plans to evaluate performance such as sealing, leakage, and handling robustness
* Document results and support analysis of issues and design improvements

Materials & process environment

* Select and qualify materials such as polymers, elastomers (e.g., FKM/FFKM), ceramics, metals, and coatings for harsh wet chemistry environments
* Ensure compatibility with plating chemistries, acids, solvents, and DI water processes
* Design for cleanability, maintainability, and minimal chemical retention

Manufacturing & productization

* Collaborate with suppliers and manufacturing to ensure high-quality, cost-effective, and scalable designs
* Drive DFM/DFA improvements for complex assemblies such as substrate holders and handling interfaces
* Define and release complete documentation including drawings, specifications, and assembly concepts
* Perform technical design reviews and work in cross-functional project teams
* Drive standardization of substrate holder platforms and modular design concepts

Who we're looking for

Minimum qualifications

* Bachelor's or Master's degree in Mechanical Engineering or related field
* 3-5 years of experience in mechanical design or product development
* Strong experience in precision mechanical design, ideally in complex equipment or capital systems
* Proficiency in 3D CAD tools (Siemens NX, SolidEdge, or similar)
* Solid foundation in GD&T, tolerance analysis, and assembly design
* Hands-on experience in testing, debugging, and validating mechanical systems

Preferred qualifications

* Exposure to semiconductor equipment, wet processing, or plating systems
* Experience with substrate holders, chucks, or wafer/panel handling systems
* Strong understanding of:
*
** Sealing technologies (static and dynamic seals)
** Chemical compatibility and material selection
** Precision alignment and handling of fragile substrates
* Experience working with automation systems

https://careers.lamresearch.com/careers/apply?pid=1099554202588

Lam Research Salzburg GmbH

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